SEM
R&D > Research Equipment
Scanning electron microscope
|
Subject |
Content |
|---|---|
|
Instrument |
EM-30N (COXEM) |
|
Magnitude |
x20~x150,000 |
|
Image |
SEI (secondary electron image), BSEI (back scattered electron image) |
|
Voltage |
1 kV~30 kV |
|
Ion sputter coater |
SPT-20 (COXEM) |