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Puresorb® PFC-100

Usage

Puresorb® PFC-100 제품명, 제거가스, 특징, 적용분야에 완련된 표
Product name Puresorb® PFC-100
제거가스 Perfluorinated compounds such as NF3, SF6, CF4, C2F6, C3F8, SF6
Characteristics
  • 98% or higher removal through bulk reaction with PFCs
  • No post-process emission of fluorinated compounds
  • Thermally stable
Applicable fields
  • Semiconductor, display manufacturing processes

Product specifications

Puresorb® PFC-100 제품명, 제품 설명, 비표면적(m2/g), 크기 및 형태, 충전밀도(g/cm3), 색상, 함수율(wt. %)에 관련된 표
Product name Puresorb® PFC-100
Product description PFCs Adsorbent
Specific surface area(m2/g) Above 40
Form and Size 2mm Pellet, 3mm Pellet
Charge density(g/cm3) 0.60 ± 0.05
Color White, light gray
Moisture(wt. %) Below 1

Operating conditions

Puresorb® PFC-100 가스, 운전온도, 반응 메커니즘에 관련된 표
Gas Operating temperature(°C) Reaction mechanism
CF4 > 550 2MO + CF4 ▶ 2MF2 + CO2
NF3 > 350 3MO + 2NF3 ▶ 3MF2 + aNO + bNO2 + cN2O
SF6 > 550 6MO + SF6 ▶ 6MF2 + 2SO2 + O2

Test certificate

View test certificate

Product image

  • Puresorb® PFC-100
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